VTM System

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VTM System NINEBELL
300mm Loadlock & Vacuum Transfer Module (VTM) Scan Robot for 300mm Ion Implanter 300mm Vacuum Robot
Customer Center
TEL031-707-9362
FAX031-705-9365

- Mon~Fri : Am 9. ~ Pm 6
- Sat, Sun: Holiday
  • Scan Robot for 300mm Ion ImplanterPRODUCTS
  • NINEBELL

Scan Robot for 300mm Ion Implanter

• Application
  • 1. 300mm Ion Implanter
• Feature
  • 1. Ninebell’s Own Unique Design
  • 2. Horizontal Scalar Motion Scan
  • 3. High Angle ISO-Centric Scan
    → 0˚~55˚ Tilt ISO-Centric Scan Capability
    → Good Unif. at High Tilt Angle Ion Implantation even at Low Energy
  • 4. Precise Scan Angle Control → Scan Angle Variation < ±0.15˚
  • 5. Supply to Major Implanter Company
B-615 Central Biz Tower 2, 99 Sagimakgol-Ro, Jungwon-Gu, Seongnam-Si, Gyeonggi-Do, 13201 Korea
|TEL : 031-707-9362
|FAX : 031-705-9365
|Company Registration Number : 123-81-44708
|CEO : 최문수
|Personal information manager : 최문수
|privacy policy
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