VTM System

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VTM System NINEBELL
300mm Loadlock & Vacuum Transfer Module (VTM) Scan Robot for 300mm Ion Implanter 300mm Vacuum Robot
Customer Center
TEL031-707-9362
FAX031-705-9365

- Mon~Fri : Am 9. ~ Pm 6
- Sat, Sun: Holiday
  • 300mm Loadlock & Vacuum Transfer Module (VTM)PRODUCTS
  • NINEBELL

300mm Vacuum Robot

• Application
  • 1. 300mm Ion Implanter
  • 2. Vacuum Robot for High Vacuum Process
• Feature
  • 1. Ninebell’s Own Design for High Reliability using Dual DD Motors
  • 2. Reliable Motion Repeatability → Wafer Position Repeatability Error < ± 50㎛
  • 3. High Speed Robot → Takt Time of each Motion for GET or PUT < 2 sec.
  • 4. Supply to Major Implanter Company
B-615 Central Biz Tower 2, 99 Sagimakgol-Ro, Jungwon-Gu, Seongnam-Si, Gyeonggi-Do, 13201 Korea
|TEL : 031-707-9362
|FAX : 031-705-9365
|Company Registration Number : 123-81-44708
|CEO : 최문수
|Personal information manager : 최문수
|privacy policy
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