Kor
ABOUT
CEO Message
Overview
History
Certification&Prize
Location
ATM System
EFEM & Process
Standard Robot
VTM System
300mm Loadlock & Vacuum Transfer Module (VTM)
Scan Robot for 300mm Ion Implanter
300mm Vacuum Robot
Healthcare
Smart Care Bed
CS
Notice
Q/A
KOR
VTM System
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VTM System
NINEBELL
300mm Loadlock & Vacuum Transfer Module (VTM)
Scan Robot for 300mm Ion Implanter
300mm Vacuum Robot
Customer Center
TEL
031-707-9362
FAX
031-705-9365
- Mon~Fri : Am 9. ~ Pm 6
- Sat, Sun: Holiday
300mm Loadlock & Vacuum Transfer Module (VTM)
PRODUCTS
NINEBELL
300mm Vacuum Robot
• Application
1. 300mm Ion Implanter
2. Vacuum Robot for High Vacuum Process
• Feature
1. Ninebell¡¯s Own Design for High Reliability using Dual DD Motors
2. Reliable Motion Repeatability ¡æ Wafer Position Repeatability Error < ¡¾ 50§
3. High Speed Robot ¡æ Takt Time of each Motion for GET or PUT £¼ 2 sec.
4. Supply to Major Implanter Company
ABOUT
CEO Message
Overview
History
Certification&Prize
Location
ATM System
EFEM & Process
Standard Robot
VTM System
300mm Loadlock & Vacuum Transfer Module (VTM)
Scan Robot for 300mm Ion Implanter
300mm Vacuum Robot
Healthcare
Smart Bed
CS
Notice
Q/A
ABOUT
ATM System
VTM System
Healthcare
CS
B-615 Central Biz Tower 2, 99 Sagimakgol-Ro, Jungwon-Gu, Seongnam-Si, Gyeonggi-Do, 13201 Korea
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TEL : 031-707-9362
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FAX : 031-705-9365
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Company Registration Number : 123-81-44708
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CEO : ÃÖ¹®¼ö
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Personal information manager : ÃÖ¹®¼ö
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privacy policy
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